| 摘要 |
PURPOSE:To minimize the generation of dust resulting from a residue at the time of pattern-developing a photosensitive film on a glass substrate and then removing the residue remaining on the substrate in the production of the pattern of a color filter, etc. CONSTITUTION:This jig is provided with the table 10 having a porous temporary adhesive sheet 30 for temporarily fixing a substrate 1 on the surface and a part 20 for supporting the table 10 horizontally rotatably. |
