| 摘要 |
PURPOSE:To accurately detect a three-dimensional solder shape from a single sheet of image information by irradiating solder as a measurement object with illumination light from a light source of multi-stage annular type, and photographing the solder with a camera. CONSTITUTION:A light source 2 is provided in a multi-stage, for example, in four stages, so as to have concentric arrangement and give different irradiation angles along the altazimuth line of a virtual hemisphere about solder 6 as a measurement object. The light source 2 is formed to be annular as a whole. The light source 2 is turned on to irradiate the solder 6, thereby forming circular fringe calescence point images on the surface of the solder 6 under reflected light. A radial density measurement scanning line is determined on the image of calescence points photographed with a camera 4. Furthermore, the inclination angle of a reflection point as a measurement point on the surface of the solder 6 is obtained by establishing correspondence to a density distribution value on the scanning line as well as the graph of preliminarily measured inclination angle-reflection intensity. Thereafter, a distance from the center of the solder 6 to the measurement point and the height thereof are found, on the basis of the inclination angle, thereby detecting the surface contour of the solder 6. |
