发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To lower the operating voltage and increase the number of times of rewriting storage information, by applying the gate electrode of a Schottky gate field effect transistor to a first electrode, which is applied to a storage region of memory information charges. CONSTITUTION:The gate electrode of a Schottky gate field-effect transistor formed on a GaAs semiconductor substrate 1 is applied to a first gate electrode 3. An insulating film 4 between gate electrodes is formed on the first gate electrode 3. A second gate electrode 5 is formed on the first gate electrode 3, via the insulating film 4. The first gate electrode 3 serves as the storage part of memory information charges, and the second gate electrode 5 acts as the electrode for controlling the writing and erasing of the memory information charges. The information charges of the first gate electrode 3 are written and erased via a Schottky barrier between the semiconductor substrate 1 and the first gate electrode 3. Thereby the number of times of rewriting the information charges can be increased.
申请公布号 JPH0817946(A) 申请公布日期 1996.01.19
申请号 JP19940146338 申请日期 1994.06.28
申请人 NEC CORP 发明人 UENO KAZUYOSHI
分类号 H01L21/8247;H01L27/105;H01L29/788;H01L29/792 主分类号 H01L21/8247
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