摘要 |
PURPOSE:To provide an ultrasonic motor excellent in environmental resistance by preventing the deterioration of an electrode and a junction member. CONSTITUTION:This ultrasonic motor is equipped with an electromechanical converting element 12 excited by the drive signal inputted into the electrodes 13a and 13b on both sides, and an elastic body 11 joined on the side of one electrode 13a of the electromechanical converting element 12, and the outside periphery 15a and the inside periphery 15b of the junction between the electromechanical converting element 12 and the elastic body 11 are covered with protective films 4a and 4b. The protective film is mode of synthetic high polymer such as acrylic resin, epoxy resin, silicone resin, etc., or a glass coat. Accordingly, since the protective films 4a and 4b are provided at the sections exposed to circumferential environment, at the electrodes 13a and 13b or an adhesive 14, the deterioration of the electrodes 13a and 13b or the adhesive 14 by the influence of the circumferential environment such as the penetration of water, ions, etc., or oxidation, etc. |