| 摘要 |
<p>PURPOSE:To extend trenches a little upward in the inner surface of a carrier, by digging the trenches having the direction and the pitch which coincide with those of trenches in the main side surface of the carrier main body. CONSTITUTION:The jig has a trunk part constituted of a lower end portion 3 along the form of an aperture of a carrier main body 7, a main trunk part 5 reaching an upper end portion 2 from the lower end portion 3, and a side trunk part 5. The form is a ring which coincides with the upper form of the carrier main body. Trenches 4 whose pitch and direction coincide with those of wafer retaining trenches 4 inside the main side surface are made in the inner wall of the main trunk part 5 positioned on the main side surface 11 of the carrier main body 7. Thereby the action wherein the trenches in the carrier are stretched a little upward is obtained. Fixing mechanism to the carrier is not specially provided, but the jig is only mounted on the carrier main body. The height of the trunk part of the jig is about 1/3 the diameter of a wafer to be accommodated. When the interval between the peaks of the trenches 4 is reduced, swing of the wafer can be regulated, and workability is improved.</p> |
