| 摘要 |
PURPOSE:To completely remove neutral corpuscles (debris) that are generated at the same time as an X-ray from a plasma on the surface of a target material by a laser plasma X-ray source. CONSTITUTION:An ultraviolet lamp 11, a mesh electrode 15, and an electromagnet 18 are provided between a target material 5 and a takeout window 6 in order to remove neutral corpuscles (debris) that are generated at the same time as an X-ray emitted from a plasma Ps generated on the surface of the target material 5 by the condensing and applying of a laser beam 3. The neutral corpuscles are charged by the ultraviolet lamp 11, and a trajectory on which the charged corpuscles fly is deflected by the action of an electromagnetic field, which is produced in such a way as to orthogonally intersect both an electric field (E) produced by the electrode 15 and a magnetic field (B) produced by the electrodes 18a, 18b of the electromagnet 18, so as to expel the corpuscles out of the course of the X-ray. |
