发明名称 PELLET POSITION DETECTING METHOD OF PELLET BONDING DEVICE
摘要 PURPOSE:To improve a pellet bonding device in accuracy of detecting the position of a pellet without making it complicated in structure CONSTITUTION:Image picture data of one corner A of a pellet 13 are latched by a camera, and the a rotary table 24 is rotated to position the other corner B of the pellet 13 in the recognition region of the camera and to enable the camera to latch the image picture data of the corner B, and the positional deviations of the corners A and B from the reference positions of them are detected on the basis of the picture image data of the corners A and B and the reference picture image data of them.
申请公布号 JPH0817851(A) 申请公布日期 1996.01.19
申请号 JP19940171590 申请日期 1994.07.01
申请人 TOSHIBA SEIKI KK 发明人 TAKEDA YASUSHI
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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