| 摘要 |
PURPOSE:To provide a surface analyzer which has high resolution of 1mum or less in a surface direction and high signal intensity and can obtain chemical information of element type, chemical bond state, etc. CONSTITUTION:A light of a vacuum ultraviolet region is condensed from soft X-rays by using an optical system, and radiated to a sample surface. Kinetic energy of electrons emitted from the surface is analyzed to obtain chemical information of the surface. Two variable slits 18, 18' are sued for the system thereby to continuously vary the spot sizes of the light on the sample 5, and the light can be condensed to the much smaller region. |
