PLASMA RECOMBINATION X-RAY LASER ALIGNER

摘要

PURPOSE:To provide a plasma recombination X-ray laser aligner by which a minute pattern can be transferred by using soft X-ray and which is small and low-cost. CONSTITUTION:A plasma recombination X-ray laser aligner is constituted in such a way that a pulse-train laser is shone at a laser oscillator 1 and amplifiers 2, 3 from an excitation laser-irradiation mechanism 4 and that a plasma recombination X-ray laser which has been oscillated and amplified by the laser oscillator 1 and the amplifiers 2, 3 is shone at a semiconductor wafer 5 on a wafer stage 6 via an exposure pattern 7a so as to perform an exposure operation.