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发明名称	HEATRE
摘要
申请公布号	JPH0815369(A)	申请公布日期	1996.01.19
申请号	JP19940171973	申请日期	1994.06.30
申请人	SONY TEKTRONIX CORP	发明人	YASU JUNICHI;HASEGAWA YUJI
分类号	G01R31/26;H01L21/66;(IPC1-7):G01R31/26	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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