PLASMA TREATMENT METHOD,申请号JP19950055407-传众专利搜索

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发明名称	PLASMA TREATMENT METHOD
摘要
申请公布号	JPH0817807(A)	申请公布日期	1996.01.19
申请号	JP19950055407	申请日期	1995.03.15
申请人	HITACHI LTD	发明人	KAWASAKI YOSHINAO;KAWAHARA HIRONORI;KUDO KATSUYOSHI;HIROBE YOSHIMICHI;KAKEHI YUTAKA
分类号	H05H1/46;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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