摘要 |
There is described a method for creating and keeping a controlled atmosphere in a FED, essentially free of oxidizing gases and including hydrogen at a pressure comprised between 10-7 and 10-3 mbar, which comprises the step of arranging inside the FED, before it is frit sealed, a getter material previously charged with hydrogen gas. Subsequently, the two parts forming the FED are frit sealed along their perimeter and the FED itself is evacuated during this operation or later, through a suitably arranged tail, which is hermetically closed after being evacuated through a "tip-off". The getter material is charged by exposing it to hydrogen gas at a pressure comprised between 10-4 and 2 bar.
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