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发明名称
Fast atom beam source
摘要
申请公布号
EP0502429(B1)
申请公布日期
1996.01.17
申请号
EP19920103408
申请日期
1992.02.27
申请人
EBARA CORPORATION
发明人
HATAKEYAMA, MASAHIRO;NAGAI, KAZUTOSHI
分类号
H01J37/02;H05H3/02;(IPC1-7):H05H3/02
主分类号
H01J37/02
代理机构
代理人
主权项
地址
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