| 摘要 |
PURPOSE:To miniaturize pressure sensors and to arrange the same at a minute interval, by forming a large number of recessed parts to the surface of a semiconductive substrate to provide thin wall parts and forming piezoelectric converter elements to said thin wall parts to use the same as the pressure sensors. CONSTITUTION:A large number of pressure-sensitive diodes 44 are formed to a semiconductive chip 42 and recessed parts are formed to the back surface thereof to make the wall of the semiconductive chip 42 thin and a rubber filler 54 for transmitting the pressure vibration from the surface 14 of the body is embedded in the recessed parts. By this constitution, the pressure vibration of a pulse wave is detected by the pressure-sensitive diodes 44. Therefore, the pulse wave in the direction crossing the artery 50 can be detected at an extremely small interval. As a result, the pulse wave can be detected by pressing three or more pressure-sensitive diodes 44 to the part directly above the artery 50 and, for example, by selecting the pulse wave signal SM outputted from the pressure-sensitive diode 44 at the central part directly above the artery 50 and hardly affected by the tension of a tube wall, a pulse wave can be detected with high accuracy. |
