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发明名称
摘要
申请公布号
JPH084136(B2)
申请公布日期
1996.01.17
申请号
JP19870326178
申请日期
1987.12.22
申请人
发明人
分类号
H01L29/762;H01L21/339;H01L29/768;(IPC1-7):H01L29/762
主分类号
H01L29/762
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代理人
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