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发明名称
PRIMARY FLOW CVD APPARATUS AND METHOD
摘要
申请公布号
EP0585343(A4)
申请公布日期
1996.01.17
申请号
EP19920911855
申请日期
1992.04.09
申请人
SILICON VALLEY GROUP, INC.
发明人
LEARN, ARTHUR J.;DU BOIS, DALE R.;MILLER, NICHOLAS E.;SEILHEIMER, RICHARD A.
分类号
C23C16/44;C23C16/452;C23C16/455;C23C16/52;H01L21/205;(IPC1-7):C23C16/02
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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