| 摘要 |
PURPOSE:To produce aluminum nitride powder capable of obtaining a multi- layer sintered body excellent in deforming property of a sheet in a thickness direction when sheet forming is executed and excellent in hermetic seal property required to a ceramic package material. CONSTITUTION:This aluminum nitride powder satisfies 4.5<=d2/d1 wherein heavy- duty bulk density is denoted as d1 and press bulk density at 200kg/cm<2> as d2. A powdery mixture of alumina and carbon is burned at 1300-1700 deg.C in a non- oxidizing atmosphere, moreover, burned at 650-750 deg.C in the oxidizing atmosphere with 400-6000ppm water concn., and subjected to a decarbonization treatment to obtain the aluminum nitride powder. |
