发明名称 |
X-ray interface and condenser |
摘要 |
An x-ray interface (40) provides increased x-ray collection efficiency for use in x-ray photolithography. The interface (40) comprises a housing (44) having a plurality of mirrored funnels (46) for collecting the x-rays. The mirrored funnels (46) are shaped to partially collimate and focus the x-rays. The interface (40) collects a greater percentage of the available x-rays from an x-ray source, and the interface (40) also permits a greater number of beamlines to be coupled to the x-ray source.
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申请公布号 |
US5485498(A) |
申请公布日期 |
1996.01.16 |
申请号 |
US19940269593 |
申请日期 |
1994.07.01 |
申请人 |
MOTOROLA, INC. |
发明人 |
WALDO, III, WHITSON G.;BRODSKY, ERIC;CERRINA, FRANCO |
分类号 |
G03F7/20;G21K1/06;(IPC1-7):G21K1/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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