EVACUATING VALVE FOR CVD DEVICE,申请号JP19940165945-传众专利搜索

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发明名称	EVACUATING VALVE FOR CVD DEVICE
摘要
申请公布号	JPH0813149(A)	申请公布日期	1996.01.16
申请号	JP19940165945	申请日期	1994.06.24
申请人	BENKAN CORP	发明人	IWABUCHI TOSHIAKI
分类号	F16K49/00;C23C16/44;C23C16/455;F16K51/02;(IPC1-7):C23C16/44	主分类号	F16K49/00
代理机构		代理人
主权项
地址

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