INDIUM OXIDE SPUTTERING TARGET, ITS PRODUCTION, INDIUM OXIDE FILM, AND PRODUCTION OF INDIUM OXIDE FILM,申请号JP19940152025-传众专利搜索

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发明名称	INDIUM OXIDE SPUTTERING TARGET, ITS PRODUCTION, INDIUM OXIDE FILM, AND PRODUCTION OF INDIUM OXIDE FILM
摘要
申请公布号	JPH0813140(A)	申请公布日期	1996.01.16
申请号	JP19940152025	申请日期	1994.07.04
申请人	HITACHI METALS LTD	发明人	FUKUSHIMA HIDEKO;SAKAKIBARA MASAHIKO;KIKUCHI HIROMI
分类号	C23C14/08;C23C14/34;(IPC1-7):C23C14/34	主分类号	C23C14/08
代理机构		代理人
主权项
地址

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