首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH0813169(A)
申请公布日期
1996.01.16
申请号
JP19940208008
申请日期
1994.08.09
申请人
TOKYO ELECTRON LTD
发明人
SUZUKI AKIRA;ISHIZUKA SHUICHI;KAWAMURA GOHEI;HATA JIRO;ISHIKAWA KENJI
分类号
H05H1/46;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Recovery of germanium from aqueous solutions by solvent extraction.
Optically active-2-biphenylpyridines.
Method of processing contaminated soil.
GRAZING INCIDENCE REFLECTION SPECTROMETER
TENSIONING CONNECTION
SLUG-CATCHER THAT CAN BE PIGGED
RECORDING UNIT
A SLUICE DEVICE
PROCESS FOR THE PRODUCTION OF CATALYSTS, AND THEIR USE IN HYDROGENATION OR AMINATION REACTIONS
USE OF SOME 2-Û2-Û4-PHENYL-1-PIPERAZINYL¨ETHYL¨-1H-NAPHTH-Û1,2-D¨IMIDAZOLE DERIVATIVES AND THEIR PHARMACEUTICALLY ACCEPTABLE SALTS FOR THE MANUFACTURE OF A MEDICAMENT FOR THE TREATMENT OF CARDIOVASCULAR DISEASES
FRICTION CLUTCH DISC
FLOW METER WITH A THERMALLY RESISTANT ELEMENT
PROCESS FOR REPAIRING THE ELECTRODES OF A DISPLAY PANEL
DEVICE FOR THE SELECTIVE AMPLIFICATION OF RADIOELECTRICAL SIGNALS
SPECTRUM ANALYSER USING SURFACE WAVE DISPERSION FILTERS
METHOD FOR DETERMINATION OF OPTIMUM PARAMETERS FOR STRESS SCREENING OF ELECTRONIC COMPONENTS AND CIRCUIT BOARDS
DEVICE FOR INSERTING OPTICAL FIBRES
A METHOD FOR THE OPTICAL PURIFICATION OF AN OPTICALLY ACTIVE 2,2-DIMETHYLCYCLOPROPANECARBOXYLIC ACID AMIDE
BETA-CYCLODEXTRIN AND PROCESS FOR ITS PREPARATION
HIGH STRENGTH MATERIAL PRODUCED BY CONSOLIDATION OF RAPIDLY SOLIDIFIED ALUMINUM ALLOY PARTICULATES
