Method of calibrating a thickness measuring device and device for measuring or monitoring the thickness of layers, tapes, foils, and the like

摘要

PCT No. PCT/DE91/00292 Sec. 371 Date Dec. 10, 1992 Sec. 102(e) Date Dec. 10, 1992 PCT Filed Apr. 5, 1990 PCT Pub. No. WO91/15733 PCT Pub. Date Oct. 17, 1991.A method of calibrating a thickness measuring device having preferably two noncontacting or scanning displacement measuring sensors (2, 3), which allows to calibrate in a simple manner, at the location of measurement, thickness measuring devices operating by different measuring principles by means of a reference object (7).