发明名称 DEFOAMING AND DISPERSING AGENT FOR PHOTOSENSITIVE RESIN
摘要 PURPOSE:To obtain a chemical excellent in defoaming property and dispersing property, which is used in photosensitive resin industry, by using a specific structural compound synthesized by the addition reaction of a higher alcohol having alkyl group or alkenyl group of a specific number of carbon with propylene oxide and ethylene oxide. CONSTITUTION:The compounds expressed by the formula (R is a 24C linear or branched alkyl group or alkenyl group, (m) is 5-60 and (n) is 1-2) are used alone or by mixing. The compound is produced by adding 1-25mol ethylene oxide to the higher alcohol having a 24C linear or branched alky group or alkenyl group after adding 5-60mol propylene oxide thereto. This compound has excellent defoaming property together with excellent dispersing property and shows excellent effect as a defoaming and dispersing agent in the developing process of a photosensitive resin. The quantity to be used is 0.05-0.2wt.% per a usual developer though it can not be fixed unequivocally.
申请公布号 JPH0810600(A) 申请公布日期 1996.01.16
申请号 JP19940170479 申请日期 1994.06.30
申请人 TOHO CHEM IND CO LTD 发明人 MIYASHITA NORIYUKI;YAMAUCHI TAKASHI;NOBUCHIKA KAZUO
分类号 G03F7/32;B01F17/42;H01L21/027;(IPC1-7):B01F17/42 主分类号 G03F7/32
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