RASTEROBJEKTIV UND RASTER-STRAHLUMFORMER SOWIE OPTISCHE ABTASTVORRICHTUNG MIT ZUMINDEST EINEM DIESER ELEMENTE

摘要

A grating objective is described which comprises at least three gratings and in which the axial ray and a border ray of a radiation beam are interchanged at least three times so that the objective has a wavelength-independent behaviour, a relatively large image field and a satisfactorily uniform intensity distribution. A beam shaper and a grating objective with a built-in beam shaper based on the same principle are also described.