发明名称 |
SECONDARY ION MASS ANALYZER |
摘要 |
The secondary ion mass spectrometry is characterized in that a secondary ion generating part has a pulse voltage generator to generate a voltage in turns, and a spectrum may be an electrostatic spectrum capable of changing the direction of the electrode, or a magnetic spectrum having exits in two directions.
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申请公布号 |
KR960000807(B1) |
申请公布日期 |
1996.01.12 |
申请号 |
KR19920000154 |
申请日期 |
1992.01.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
MOON, HWAN - KOO;KIM, DONG - WON |
分类号 |
G01N27/62;(IPC1-7):G01N27/62 |
主分类号 |
G01N27/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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