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发明名称
FORMATION OF COPPER FILM AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH088253(A)
申请公布日期
1996.01.12
申请号
JP19940137597
申请日期
1994.06.20
申请人
FUJITSU LTD
发明人
MISAWA NOBUHIRO
分类号
C30B25/14;C07F1/08;C23C16/18;H01L21/28;H01L21/285;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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