| 摘要 |
PURPOSE:To stabilize the output of beams as well as to improve the operation efficiency by using the cesium effectively. CONSTITUTION:A heater 22 to heat a cesium vapor led in to an iion source main body 1, and a tungsten membrane 24 to pass the cesium vapor, are provided at the tip of a cesium leading-in pipe 15. And the cesium is charge converted to the positive side by a surface ionization method, and lid in to the ion source main body 1. And the resultant cesium is guided preferentially to a converter head 9 where a negative voltage has been applied.
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