| 摘要 |
PURPOSE:To automatically transfer thin substrates on a working table to a carrying table, etc., while cracked substrates are removed from the working table. CONSTITUTION:Receiving and transferring bodies 13 and 14 are provided on both sides of a working table 12 so that the transferring bodies 13 and 14 can move forward and backward between the table 12 and a carrying table 15, etc., beside the table 12 and two fingers 13a and 13b and one finger 14a are respectively provided to the transferring bodies 13 and 14. In addition, an optical crack detecting sensor which is constituted to emit light toward one transferring body 13 or 14 from the other transferring body 14 or 13 side is provided between the transferring bodies 13 and 14 and a vacuum suction box 18 carrying a perforated plate 19 on its lower surface is provided above the working table 12 so that the box 18 can move forward and backward between the table 12 and its side. |
