| 摘要 |
PURPOSE:To determine a reference without spending much time and labor using a plurality of pieces of information even when they are obtained according to a pattern with a surface-shaped pattern and further improve measurement accuracy and obtain height information at a minute position. CONSTITUTION:A pattern is formed on a target to be inspected by a pattern projection means 90, the image of the target which is subjected to pattern projection by an image input means 91 is digitized and accumulated in an image memory, a pattern position is detected within each pattern detection range by a pattern position detection means 92, the position of a pattern detected by a conformity discrimination means 93 according to a neural network is input, and judgment is made by the neural network with the conformity judgment result as output. |
