| 摘要 |
PURPOSE:To obtain the manufacture with which the uniform calcination can be performed at the time of calcining cured resin substrates by providing a lapping stage before the calcination/carbonization stage. CONSTITUTION:This manufacture comprises.the following stages, namely, (1) resin synthesis, (2) resin curing, (3) coring, (4) lapping before calcination, (5) calcination/ carbonization, (6) lapping after calcination, (7) chamfering and (8) polishing and these stages are performed in that order, wherein: in the stage of lapping before calcination (4), the surface of each of the cured resin substrates 5 cored in the coring stage (3) is ground with loose abrasive grains by using a double-side grinding machine 6; and in the calcination/carbonization stage (5), a large number of the cured resin substrates 5 are arranged on one of the graphite plates (carbon plates) 7 and further, on this set of a large number of the substrates 5 and one of the graphite plates 7, several similar sets 5 are stacked up successively and the stacked cured resin substrates 5 are calcined in a calcination furnace. Thus, the flatness/surface roughness of the cured resin substrates 5 are improved and the ununiformity in thickness of each of the substrates 5 and the variance of thickness among the substrates 5 are drastically reduced before performing the calcination to make possible the uniform calcination and an improvement in yield at the time of performing the calcination. |
