| 摘要 |
PURPOSE:To detect a particle with high reproducibility in a short time without requiring mechanical shift of a sample by turning a plurality of switches, disposed at least on the driving side or the output side of each inspection unit, ON/OFF. CONSTITUTION:A plurality of semiconductor switches 81, 82, for example, are connected between the driving section 50 for an inspection unit 20 and the electronic scanning system 30 for the unit 20, and between the secondary electron detection system 40 for the unit 20 and the operation control section 60. When the switches 81, 82 connected with an inspection unit An-1, for example, are switched through a switching control section 63, electrons are emitted from the electron source of the unit An-1 and raster scanning is effected on the surface of a sample opposing the unit An-1. Other switches 81, 82 are released at that time. When a plurality of units 20 are operated sequentially as the inspection time elapses, the front face of the sample facing the unit 20 can be scanned in a short time without requiring any mechanical shift of the sample. |
