| 摘要 |
PURPOSE:To enable high-speed processing by performing detailed inspection only for an inspection required signal, for which necessity to perform the detailed inspection is judged by a simplified inspection means, among input signals. CONSTITUTION:Concerning respective partial image signals divided by an image dividing means 8, whether it is necessary to perform the detailed inspection is first inspected by the simplified inspection means composed of a threshold value processing part 11, binary image storage part 12, horizontal shading part 13, vertical shading part 14 and selecting part 15. This processing can be performed at comparatively high speed. Only for the partial image signal as the inspection required signal for which necessity to perform the detailed inspection is decided by the simplified inspection means, the detailed inspection is performed by a detailed inspection means composed of a higher-order flaw detecting part 16 so as to exactly detect any flaw although it takes comparatively long time. Therefore, since the detailed inspection not to be finished in real time is put at the higher-order flaw detecting part 16 for an inspection object for which probability to make the flaw existent in the inspection image is low, the amount of object signals to perform the detailed inspection can be suppressed at an irreducible minimum. |
