| 摘要 |
<p>PURPOSE:To reduce adhesion of dust significantly while preventing generation of static electricity by gripping a a rear incident projection detection element, along with the package thereof, with the light incident face directing sideways by means of a grip holder and then transferring the package through a mechanical transfer means. CONSTITUTION:A package mounting a rear projection optical detection element is set on a pre-inspection tray 8 with the light incident surface directing upward. It is then gripped by means of grip holder 10 and transferred on the tray 8 through a mechanical transfer means 11 to inspection units 12, 13. At the time of transfer, the light incident surface of the optical detection element is directed sideways. Upon finishing the inspection, the package is transferred through the mechanical transfer means 11 with the light incident surface of the rear projection optical detection element directing sideways. This structure reduces adhesion of dust produced from a worker while exhibiting an electrostatic breakdown prevention effect. Furthermore, the working time is shortened because the visual inspection can be carried out simultaneously with inspection of optical characteristics.</p> |
