Fluorescent X-ray radiation analysis device

摘要

The device has a source (2) for irradiating a sample (S) containing silicon with a primary X-ray beam (B2) with a wavelength immediately above the Si-K absorption boundary, with a detector (4) for the emitted fluorescent X-ray radiation (B5). The detector is coupled to an analyser (6), for determining the chemical elements contained in the sample, in dependence on the detector output signal. Pref. the source is provided by an X-ray beam generator (5) and a monochromator (10), for providing a monochromatic X-ray beam with removal of the wavelength components within the silicon stimulation wavelength range.