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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH088245(A)
申请公布日期
1996.01.12
申请号
JP19940141987
申请日期
1994.06.23
申请人
RICOH CO LTD
发明人
MOCHIZUKI EIJI
分类号
H01L21/316;H01L21/318;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
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