Microvacuum sensor with extended sensitivity range.,申请号EP19940120290-传众专利搜索

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发明名称	Microvacuum sensor with extended sensitivity range.
摘要
申请公布号	EP0660096(A3)	申请公布日期	1996.01.10
申请号	EP19940120290	申请日期	1994.12.21
申请人	HEIMANN OPTOELECTRONICS GMBH	发明人	SCHIEFERDECKER, JOERG, DR.;VOELKLEIN, FRIEDEMANN, PROF.
分类号	G01L21/12;G01L21/10;(IPC1-7):G01L21/10	主分类号	G01L21/12
代理机构		代理人
主权项
地址

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