| 摘要 |
In an optical position sensor capable of detecting a direction of incidence of light and intensity, this invention contemplates to make the sensor compact by reducing the number of pixels constituting light reception sensors and reducing the light reception area. To accomplish this object, a detection element portion 10 comprises a glass substrate 22, a light shading film 24 formed on a surface of the glass substrate 22 and having mutually criss-crossing slits 24a, 24b and a light reception portion 26 fixed to the back of the glass substrate 22. Unidimensional photo-diode arrays 26X, 26Y for receiving the slit beams passing through the slits 24a, 24b respectively, and a signal processing circuit 28 for scanning the photo-diode arrays 26X, 26Y and taking out light reception signals are disposed in the light reception portion 26.
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