发明名称 Diamond covered member and process for producing the same
摘要 A diamond covered member is provided which has a diamond crystal layer formed by vapor phase synthesis on a surface of a substrate, the diamond crystal layer being constituted of plate-shaped diamond crystals at least at an initial stage of crystal growth, and being a polycrystal film formed by growth and coalescence of the plate-shaped diamond crystals, and the polycrystal film being uniformly oriented and having surface roughness (Rmax) of not larger than 0.2 mu m. A process for producing the diamond covered member is also provided. The diamond covered member has high hardness, high thermal conductivity, and high chemical stability.
申请公布号 US5483084(A) 申请公布日期 1996.01.09
申请号 US19940207627 申请日期 1994.03.09
申请人 CANON KABUSHIKI KAISHA 发明人 HIRABAYASHI, KEIJI
分类号 C30B29/04;C23C16/27;C30B25/02;C30B25/10;H01L21/205;H01L23/14;(IPC1-7):H01L29/161;H01L29/20;B05D3/06 主分类号 C30B29/04
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