发明名称 Fault tolerant anti-reflective coatings
摘要 A method for producing a narrow band anti-reflective film on a substrate, and the film produced by that method. The improved method being the concept of trimming the outer layer in order to correct for its thickness layers as well as those of the inner layer.
申请公布号 US5483378(A) 申请公布日期 1996.01.09
申请号 US19920821274 申请日期 1992.01.10
申请人 LITTON SYSTEMS, INC. 发明人 RAHN, JOHN P.
分类号 G02B1/11;(IPC1-7):G02B1/10 主分类号 G02B1/11
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