发明名称 |
Film forming apparatus |
摘要 |
A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.
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申请公布号 |
US5482607(A) |
申请公布日期 |
1996.01.09 |
申请号 |
US19930123225 |
申请日期 |
1993.09.20 |
申请人 |
NISSIN ELECTRIC CO., LTD. |
发明人 |
HASHIMOTO, HAJIME;KUBOTA, KAZUO;INOUE, DAISUKE;NOGAWA, SYUICHI |
分类号 |
C23C14/50;C23C14/56;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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