| 摘要 |
A membrane process and apparatus are described for the production of a desired very high purity permeate gas by use of a multiple stage membrane process wherein in a primary stage a process feed gas mixture is provided to a primary membrane separator unit comprising a membrane having a relatively high intrinsic permeability to provide an intermediate permeate gas and a retentate gas, and providing the intermediate permeate gas in a secondary stage to a secondary membrane separator unit comprising a membrane having a relatively low intrinsic permeability, to produce therefrom a very high purity permeate gas product.
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