Valve for vacuum pump

摘要

The valve (10) is in a connecting line between the induction and compression sides of a vacuum pump. Its vibration damping device consists of a vibration damper (17) sealed against the outside, which has a piston rod (21) with a piston (22) moving in the damping chamber (23) of a damper cylinder (19). The damper cylinder is fixed by one end in the valve casing (14), while the piston rod carrier a closing body (12) at the other end. The damper with its cylinder (19) may be connected to a valve cap (13) fixed to the valve casing. The closing body (12) can turn to a limited extent relative to the piston rod.