Vorrichtung zum Tragen und zur linearen Bewegung eines Objektes.

摘要

A movable member (4) is situated within a cylindrical member (3) so as to be axially movable. The movable member (4) is supported by a magnetic bearing device (10) in relation to the cylindrical member (3) in a perfect non-contact manner. The cylindrical member (3) and movable member (4) are provided with an electromagnetic force generating mechanism (20) for selectively applying an axial driving force to the movable member (4) in a non-contact manner. The movable member (4) is provided with an auxiliary plate (23) having an inclined surface (24) inclined with respect to the axis of the movable member (4). The axial position of the movable member (4) is detected by the output of a detector (25) which detects the distance between itself and the inclined surface (24). On the basis of the detected axial position and an objective position, the electromagnetic force generating mechanism (20) is activated to set the axial position of the movable member (4).