Vorrichtung und Verfahren zum Ablösen von Partikeln auf Gegenständen

摘要

The present invention describes a process and a device for removing particles from objects, especially as an alternative to ultrasonic or chemical cleaning. The objects to be cleaned are inserted in a process chamber (14) which is closed by a plate (24). The objects (18) are then moistened by a wetting device (42). The process chamber is then evacuated until the moisture on the objects has become ice. The ice coating is liquefied again by repressurising the chamber. The particles are easily removed from the surface of the objects by this step in the process. This process for removing particles optionally comprises a subsequent drying process. It is environment-friendly and suitable in particular for highly sensitive objects.