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发明名称
Tunnelinjektions-Halbleiterbauelement und dessen Herstellungsverfahren.
摘要
申请公布号
DE69108631(T2)
申请公布日期
1996.01.04
申请号
DE1991608631T
申请日期
1991.08.01
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
HONMA, HIDEO, HITACHI-SHI, IBARAKI-KEN, JP;KAWAKAMI, SUMIO, HITACHIOTA-SHI, IBARAKI-KEN, JP;NAGANO, TAKAHIRO, HITACHI-SHI, IBARAKI-KEN, JP
分类号
H01L21/336;H01L29/47;H01L29/772;H01L29/78;H01L29/786;(IPC1-7):H01L29/73;H01L21/329;H01L29/417;H01L29/76
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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