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发明名称
ROSETTE PREVENTION APPARATUS OF DIFFUSION FURNACE
摘要
申请公布号
KR960000142(Y1)
申请公布日期
1996.01.04
申请号
KR19930010957U
申请日期
1993.06.21
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
LEE, KYUNG - HEE
分类号
H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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