发明名称 Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces.
摘要 The present invention relates to a process for making micropoints having a controlled composition, on large surfaces, by using a cathode sputtering technique wherein means are used to make the emitted vapor flow directional, and wherein sputtering is of the magnetron type, and wherein a magnetron assistance system (31) is used.
申请公布号 FR2721751(A1) 申请公布日期 1995.12.29
申请号 FR19940007871 申请日期 1994.06.27
申请人 COMMISSARIAT A ENERGIE ATOMIQUE 发明人 DANROC JOEL
分类号 H01J9/02;(IPC1-7):H01J9/02;H01J31/12;C23C14/34;C23C14/04 主分类号 H01J9/02
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