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发明名称
Laite höyrykerrostamisen suorittamiseksi
摘要
申请公布号
FI95933(B)
申请公布日期
1995.12.29
申请号
FI19910002316
申请日期
1991.05.13
申请人
SHARP KABUSHIKI KAISHA
发明人
TANAKA, KOICHI;TERADA, KOUSUKE;OKIBAYASHI, KATSUSHI;MIKAMI, AKIYOSHI;YOSHIDA, MASARU;NAKAJIMA, SHIGEO
分类号
H05B33/10;C23C16/18;C23C16/44;C23C16/448;C23C16/455;C23C16/46;H01L21/205;(IPC1-7):C23C14/56
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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