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发明名称
Fabrication of electronic and optoelectronic components.
摘要
申请公布号
EP0652486(A3)
申请公布日期
1995.12.27
申请号
EP19940117344
申请日期
1994.11.03
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
BERATAN, HOWARD R.;CHO, CHIH - CHEN;SUMMERFELT, SCOTT R.
分类号
B05D1/40;B05D7/00;B32B27/30;C09D127/12;G03F7/004;G03F7/085;H01L21/312;H01L21/822;H01L27/04;(IPC1-7):G03F7/085;H01L21/48
主分类号
B05D1/40
代理机构
代理人
主权项
地址
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