发明名称 |
METHOD AND APPARATUS FOR SEMICONDUCTOR CHIP TRANSDUCER |
摘要 |
A motion transducer fabricated from a semiconductor material by etched exposure and release of a resiliently suspended element. Electrical sensing and/or torquing is applied to the suspended element to produce mass or vibrational sensitivities to provide a transducer for various physical parameters. In the case of a gyroscopic transducer a mass is applied to the element and may be applied in a balanced configuration on either side. The semiconductor element and electrodes may be isolated by the use of buried PN junctions or dielectric layers, and a separately formed insulating dielectric bridge may be used to provide a support link between the suspended element and the remainder of the semiconductor material. A specific crystal orientation is useful in permitting etch control in freeing the suspended element from the remainder of the material. Suspension link stress relief is provided and a waffle construction achieved in the suspended element for use in motional transduction. <IMAGE> |
申请公布号 |
EP0442280(A3) |
申请公布日期 |
1995.12.27 |
申请号 |
EP19910100592 |
申请日期 |
1991.01.18 |
申请人 |
THE CHARLES STARK DRAPER LABORATORY, INC. |
发明人 |
GREIFF, PAUL |
分类号 |
G01C19/56;G01L1/18;G01P15/08;H01L29/84 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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